Magnetically enhanced reactive ion etching (MERIE) with...

Microelectronic Engineering 1989 Vol. 10; Iss. 1

Magnetically enhanced reactive ion etching (MERIE) with different field configurations

K.P. Müller, F. Heinrich, H. Mader
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Volume:
10
Year:
1989
Language:
english
Pages:
13
DOI:
10.1016/0167-9317(89)90142-1
File:
PDF, 9.58 MB
english, 1989
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