Chip verification of 4 Mbit DRAMs by E-Beam testing

Microelectronic Engineering 1990 Vol. 12; Iss. 1-4

Chip verification of 4 Mbit DRAMs by E-Beam testing

Jochen Kölzer, Mike Killian, Klaus Althoff, Fergal Bonner, Siegfried Görlich, Johann Otto, Wilhelm Argyo, Fred Fox, Heinrich Hemmert, Diether Sommer
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Volume:
12
Year:
1990
Language:
english
Pages:
10
DOI:
10.1016/0167-9317(90)90012-i
File:
PDF, 665 KB
english, 1990
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