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Silylation of three component E-beam resists: application to shipley SAL 601
Thierry G. Vachette, Patrick J. Paniez, Michel MadoreVolume:
11
Year:
1990
Language:
english
Pages:
5
DOI:
10.1016/0167-9317(90)90151-i
File:
PDF, 399 KB
english, 1990