Experiments in projection lithography using soft x-rays
J.E. Bjorkholm, J. Bokor, L. Eichner, R.R. Freeman, J. Gregus, T.E. Jewell, W.M. Mansfield, A.A. MacDowell, M.L. O'Malley, E.L. Raab, W.T. Silfvast, L.H. Szeto, D.M. Tennant, W.K. Waskiewicz, D.L. WhiVolume:
13
Year:
1991
Language:
english
Pages:
8
DOI:
10.1016/0167-9317(91)90085-r
File:
PDF, 746 KB
english, 1991