Positive mode silylation process characterization
D.C. La Tulipe, A.T.S. Pomerene, J.P. Simons, D.E. SeegerVolume:
17
Year:
1992
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(92)90053-t
File:
PDF, 325 KB
english, 1992