FIB repair of integrated circuits
P.D. Prewett, M.L. McGeary, J.G. Watson, G.W. Brown, G.S. Turner, I.M. Loader, P.J. HeardVolume:
17
Year:
1992
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(92)90086-7
File:
PDF, 267 KB
english, 1992