Calculation of the influence of electric fields on primary and secondary electrons in electron beam testing of submicron structures
M. Schöttler, H.D. Storzer, E. KubalekVolume:
16
Year:
1992
Language:
english
Pages:
8
DOI:
10.1016/0167-9317(92)90372-x
File:
PDF, 494 KB
english, 1992