Fabrication and characterization of Si/SiGe nanometer...

Microelectronic Engineering 1995 Vol. 27; Iss. 1-4

Fabrication and characterization of Si/SiGe nanometer structures

J. Gondermann, B. Spangenberg, T. Ko¨ster, B. Hadam, H.G. Roskos, H. Kurz, J. Brunner, P. Schittenhelm, G. Abstreiter, H. Goßner, I. Eisele
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Volume:
27
Year:
1995
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(94)00061-x
File:
PDF, 1.15 MB
english, 1995
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