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Electron beam nanolithography with image reversal by ECR plasma oxidation
K. Kurihara, K. Iwadate, H. Namatsu, M. Nagase, K. MuraseVolume:
27
Year:
1995
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(94)00071-2
File:
PDF, 1.39 MB
english, 1995