Multilayer coated reflective optics for Extreme UV...

Multilayer coated reflective optics for Extreme UV lithography

E. Louis, H.-J. Voorma, N.B. Koster, F. Bijkerk, Yu.Ya. Platonov, S.Yu. Zuev, S.S. Andreev, E.A. Shamov, N.N. Salashchenko
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Volume:
27
Year:
1995
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(94)00096-d
File:
PDF, 260 KB
english, 1995
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