Evaluation of critical design parameters of an ion...

Microelectronic Engineering 1995 Vol. 27; Iss. 1-4

Evaluation of critical design parameters of an ion projector for 1 Gbit DRAM production

W.H. Bru¨nger, H. Lo¨schner, G. Stengl, W. Fallmann, W. Finkelstein, J. Melngailis
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Volume:
27
Year:
1995
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(94)00116-c
File:
PDF, 660 KB
english, 1995
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