Characterization of focused ion beam induced damage
D. Vetterli, M. Do¨beli, R. Mu¨hle, P.W. Nebiker, C.R. MusilVolume:
27
Year:
1995
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(94)00120-j
File:
PDF, 708 KB
english, 1995