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Interconnection lines following the surface topography fabricated by writing focused ion beam implantation
L. Bischoff, J. Teichert, E. HesseVolume:
27
Year:
1995
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(94)00123-c
File:
PDF, 461 KB
english, 1995