Simple model of the lithographic response of “Hatzakis” chemically-amplified resists
PC Miller Tate, RG Jones, J Murphy, J EverettVolume:
27
Year:
1995
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(94)00135-h
File:
PDF, 278 KB
english, 1995