Fast-cycle-time single-wafer IC manufacturing

Microelectronic Engineering 1994 Vol. 25; Iss. 2-4

Fast-cycle-time single-wafer IC manufacturing

Mehrdad M. Moslehi, Lino Velo, Ajit Paranjpe, John Kuehne, Steve Huang, Richard Chapman, Chuck Schaper, Terence Breedijk, Habib Najm, David Yin, Yong Jin Lee, Dale Anderson, Cecil Davis
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Volume:
25
Year:
1994
Language:
english
Pages:
38
DOI:
10.1016/0167-9317(94)90007-8
File:
PDF, 3.38 MB
english, 1994
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