Growth of β-SiC layers by rapid thermal chemical vapour...

Microelectronic Engineering 1994 Vol. 25; Iss. 2-4

Growth of β-SiC layers by rapid thermal chemical vapour deposition

S.P. Chiew, G. McBride, B.M. Armstrong, J. Grimshaw, H.S. Gamble, J. Trocha-Grimshaw
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Volume:
25
Year:
1994
Language:
english
Pages:
6
DOI:
10.1016/0167-9317(94)90014-0
File:
PDF, 460 KB
english, 1994
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