Dry etching techniques for GaAs ultra-high vacuum chamber...

Microelectronic Engineering 1994 Vol. 25; Iss. 2-4

Dry etching techniques for GaAs ultra-high vacuum chamber integrated processing

Duncan Marshall, Richard B. Jackman
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Volume:
25
Year:
1994
Language:
english
Pages:
6
DOI:
10.1016/0167-9317(94)90027-2
File:
PDF, 595 KB
english, 1994
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