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Double-step integrated deposition process for multilayers with accurate periodicity
A.I. Usoskin, H.C. Freyhardt, V.P. Seminozhenko, O.A. PopovaVolume:
25
Year:
1994
Language:
english
Pages:
6
DOI:
10.1016/0167-9317(94)90029-9
File:
PDF, 416 KB
english, 1994