High-field EBIC by computer controlling

Microelectronic Engineering 1994 Vol. 24; Iss. 1-4

High-field EBIC by computer controlling

Th. Hingst, M. Hübner, R. Franz, J.-Ch. Kuhr, H.-J. Fitting
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Volume:
24
Year:
1994
Language:
english
Pages:
8
DOI:
10.1016/0167-9317(94)90069-8
File:
PDF, 527 KB
english, 1994
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