Low energy focused ion beam and buried electron waveguides fabrication
F. Wakaya, A. Nozawa, J. Yanagisawa, Y. Yuba, S. Takaoka, K. Murase, K. GamoVolume:
23
Year:
1994
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(94)90119-8
File:
PDF, 362 KB
english, 1994