Enhancement of reflectivity of multilayer mirrors for soft x-ray projection lithography by temperature optimization and ion bombardment
E. Louis, H.-J. Voorma, N.B. Koster, L. Shmaenok, F. Bijkerk, R. Schlatmann, J. Verhoeven, Yu.Ya. Platonov, G.E. van Dorssen, H.A. PadmoreVolume:
23
Year:
1994
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(94)90140-6
File:
PDF, 350 KB
english, 1994