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Performance data of an environmentally stable deep UV positive resist
T. Fischer, U. Boettiger, A. Grassmann, H. Moritz, H. Binder, D. Funhoff, R. SchwalmVolume:
23
Year:
1994
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(94)90163-5
File:
PDF, 371 KB
english, 1994