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Fabrication of nanometer-structures for photonic devices based on the negative tone resist AZPN114
C. Kaden, H. Gräbeldinger, H.-P. Gauggel, V. Hofsäβ, A. Hase, A. Menschig, H. Schweizer, R. Zengerle, H.J. BrücknerVolume:
23
Year:
1994
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(94)90197-x
File:
PDF, 383 KB
english, 1994