Fabrication of nanometer-structures for photonic devices...

Microelectronic Engineering 1994 Vol. 23; Iss. 1-4

Fabrication of nanometer-structures for photonic devices based on the negative tone resist AZPN114

C. Kaden, H. Gräbeldinger, H.-P. Gauggel, V. Hofsäβ, A. Hase, A. Menschig, H. Schweizer, R. Zengerle, H.J. Brückner
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
23
Year:
1994
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(94)90197-x
File:
PDF, 383 KB
english, 1994
Conversion to is in progress
Conversion to is failed