Identification of defects in SiO2 thermally grown on Czochralski Si
Manabu Itsumi, Masato Tomita, Masataka YamawakiVolume:
28
Year:
1995
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(95)00011-v
File:
PDF, 254 KB
english, 1995