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Recent developments in Ultra thin oxynitride gate dielectrics
L.K. Han, M. Bhat, D. Wristers, H.H. Wang, D.L. KwongVolume:
28
Year:
1995
Language:
english
Pages:
8
DOI:
10.1016/0167-9317(95)00022-z
File:
PDF, 608 KB
english, 1995