Buried oxide layers formed by low dose SIMOX processes

B. Aspar, C. Guilhalmenc, C. Pudda, A. Garcia, A.M. Papon, A.J. Auberton-Herve, J.M. Lamure

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Volume:

Year:

1995

Language:

english

Pages:

DOI:

10.1016/0167-9317(95)00086-n

File:

PDF, 391 KB

english, 1995

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