Impact of proximity correction on device yield in...

Impact of proximity correction on device yield in electron-beam definition of MSM-detectors

B.E. Maile, T. Hackbarth, T. Waas
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Volume:
30
Year:
1996
Language:
english
Pages:
6
DOI:
10.1016/0167-9317(95)00189-1
File:
PDF, 929 KB
english, 1996
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