Microcolumn based low energy e-beam writing
C. Stebler, M. Despont, U. Staufer, T.H.P. Chang, K.Y. Lee, S.A. RishtonVolume:
30
Year:
1996
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(95)00191-3
File:
PDF, 1.80 MB
english, 1996