Effect of stepper lens operating conditions on proximity...

Microelectronic Engineering 1996 Vol. 30; Iss. 1-4

Effect of stepper lens operating conditions on proximity effects in DUV optical lithography down to 250nm

Graham Arthur, Brian Martin
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
30
Year:
1996
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(95)00210-3
File:
PDF, 282 KB
english, 1996
Conversion to is in progress
Conversion to is failed