Step edge cut off — A new fabrication process for metal-based single electron devices
S. Altmeyer, B. Spangenberg, F. Kühnel, H. KurzVolume:
30
Year:
1996
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(95)00272-3
File:
PDF, 543 KB
english, 1996