PMMA as an X-ray resist for micro-machining application: Latent image formation and thickness losses
Y. Vladimirsky, O. Vladimirsky, K.J. Morris, J.M. Klopf, G.M. Calderon, V. SaileVolume:
30
Year:
1996
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(95)00305-3
File:
PDF, 1.71 MB
english, 1996