Applications of polyimide membranes to MEMS technology
C. Shearwood, M.A. Harradine, T.S. Birch, J.C. StevensVolume:
30
Year:
1996
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(95)00306-1
File:
PDF, 784 KB
english, 1996