Fast, reliable mechanical probing of submicron features A new tool that combines gas-assisted FIB and mechanical probing
James Brown, Mark DeSilets, Doug Masnaghetti, Christopher G. TalbotVolume:
31
Year:
1996
Language:
english
Pages:
8
DOI:
10.1016/0167-9317(95)00337-1
File:
PDF, 467 KB
english, 1996