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Integrated Carbon Nanotube Array as Dry Adhesive for High-Temperature Silicon Processing
Youngkee Eun, Jae-Ik Lee, Jungwook Choi, Youngsup Song, Jongbaeg KimVolume:
23
Year:
2011
Language:
english
Pages:
5
DOI:
10.1002/adma.201102331
File:
PDF, 584 KB
english, 2011