![](/img/cover-not-exists.png)
Study of d.c. multipole discharges in silane-diborane and silane-phosphine mixtures
A. Lloret, G. de RosnyVolume:
62
Year:
1984
Language:
english
Pages:
10
DOI:
10.1016/0168-1176(84)80071-3
File:
PDF, 674 KB
english, 1984