Study of d.c. multipole discharges in silane-diborane and...

Study of d.c. multipole discharges in silane-diborane and silane-phosphine mixtures

A. Lloret, G. de Rosny
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Volume:
62
Year:
1984
Language:
english
Pages:
10
DOI:
10.1016/0168-1176(84)80071-3
File:
PDF, 674 KB
english, 1984
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