Analysis of microdefects in a silicon single crystal by...

Analysis of microdefects in a silicon single crystal by diffuse X-ray scattering using synchrotron radiation

Hante Kim, Shun Ji Gotoh, Toshio Takahashi, Tetsuya Ishikawa, Seishi Kikuta
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Volume:
246
Year:
1986
Language:
english
Pages:
4
DOI:
10.1016/0168-9002(86)90199-3
File:
PDF, 218 KB
english, 1986
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