Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
1988 Vol. 266; Iss. 1-3
Soft X-ray dosimetry and its application on the lithography beamline at SSRL
Daniel Seligson, Lawrence Pan, Paul King, Piero PianettaVolume:
266
Year:
1988
Language:
english
Pages:
7
DOI:
10.1016/0168-9002(88)90454-8
File:
PDF, 553 KB
english, 1988