Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
1992 Vol. 319; Iss. 1-3
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Beamlines for thin and thick resist X-ray lithography
Glen H. Dahlbacka, Jorge Pearce, Francis YoungerVolume:
319
Year:
1992
Language:
english
Pages:
7
DOI:
10.1016/0168-9002(92)90578-r
File:
PDF, 617 KB
english, 1992