A pattern-deviation photon scanning technique for precise...

A pattern-deviation photon scanning technique for precise measurement of internal component locations

William L. Dunn, Michael H. van Haaren, Abdelfatah M. Yacout
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Volume:
353
Year:
1994
Language:
english
Pages:
5
DOI:
10.1016/0168-9002(94)91745-0
File:
PDF, 310 KB
english, 1994
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