Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
1994 Vol. 347; Iss. 1-3
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UV/ozone cleaning of a replica grating
Roger W.C. Hansen, Jeff Wolske, Peter Z. TakacsVolume:
347
Year:
1994
Language:
english
Pages:
4
DOI:
10.1016/0168-9002(94)91887-2
File:
PDF, 463 KB
english, 1994