Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
1996 Vol. 377; Iss. 2-3
Defects at the Si/SiO2 interface: Their nature and behaviour in technological processes and stress
W. Füssel, M. Schmidt, H. Angermann, G. Mende, H. FlietnerVolume:
377
Year:
1996
Language:
english
Pages:
7
DOI:
10.1016/0168-9002(96)00205-7
File:
PDF, 501 KB
english, 1996