Investigations of the growth of tungsten and tungsten...

Applied Surface Science 1988 Vol. 33-34; Iss. none

Investigations of the growth of tungsten and tungsten silicides on SiO2 substrates by low pressure CVD method

Jiann-Ruey Chen, Yean-Kuen Fang, Shun-Liang Hsu
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Volume:
33-34
Year:
1988
Language:
english
Pages:
9
DOI:
10.1016/0169-4332(88)90355-8
File:
PDF, 417 KB
english, 1988
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