Room temperature anodic plasma oxidation of tantalum silicide: Oxide composition and electrical properties
A. Climent, J. Perrière, A. Laurent, B. Lavernhe, R. Pérez-Casero, J.M. Martínez-DuartVolume:
38
Year:
1989
Language:
english
Pages:
8
DOI:
10.1016/0169-4332(89)90527-8
File:
PDF, 409 KB
english, 1989