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Formation of buried CoSi2 by ion implantation
K. Kohlhof, S. Mantl, B. Stritzker, W. JägerVolume:
38
Year:
1989
Language:
english
Pages:
10
DOI:
10.1016/0169-4332(89)90540-0
File:
PDF, 630 KB
english, 1989