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Formation of titanium disilicide using different annealing methods
F. Richter, E. Bugiel, R. Grötzschel, H. Reichardt, A. Schöpke, E. Wieser, F. WolfVolume:
44
Year:
1990
Language:
english
Pages:
5
DOI:
10.1016/0169-4332(90)90099-l
File:
PDF, 335 KB
english, 1990