Photo-assisted deposition of thin films on III–V semiconductors with UV and IR lamps
Y.I. Nissim, J.M. Moison, F. Houzay, F. Lebland, C. Licoppe, M. BensoussanVolume:
46
Year:
1990
Language:
english
Pages:
14
DOI:
10.1016/0169-4332(90)90139-q
File:
PDF, 1.24 MB
english, 1990