Picosecond YAG laser photoablation of amorphous silicon
W. Marine, J.M.Scotto D'Aniello, J. MarfaingVolume:
46
Year:
1990
Language:
english
Pages:
6
DOI:
10.1016/0169-4332(90)90150-x
File:
PDF, 466 KB
english, 1990