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Ion-beam-assisted formation of interconnections into high temperature polymers
J. Davenas, G. Boiteux, J.M. Bureau, D. BroussouxVolume:
46
Year:
1990
Language:
english
Pages:
6
DOI:
10.1016/0169-4332(90)90165-v
File:
PDF, 695 KB
english, 1990