Investigation of laser recrystallization of thin Si films using numerical simulation
B. Hu, A. Seidl, R. Buchner, D. Bollmann, W. van der Wel, K. HabergerVolume:
46
Year:
1990
Language:
english
Pages:
4
DOI:
10.1016/0169-4332(90)90176-z
File:
PDF, 957 KB
english, 1990