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Ion beam modification of the dielectric properties of thin silicon dioxide films
S. Kar, A. Raychaudhuri, A.K. Sinha, S. AshokVolume:
48-49
Year:
1991
Language:
english
Pages:
5
DOI:
10.1016/0169-4332(91)90342-h
File:
PDF, 284 KB
english, 1991